Principle Components of an Electron Backscatter Diffraction (EBSD) System

Typically an EBSD system consists of:

EBSD detector mounted on the SEM chamber, together with an EDS detector
Animation showing an EBSD detector mounted on the SEM chamber, together with an EDS detector. Some EBSD detectors have elevation control, as shown, allowing greater versatility in the sample to detector geometry
Screenshot showing typical EBSD data acquisition software
EBSD software controls the whole acquisition process, from electron beam control to pattern indexing, and enables detailed interrogation of the EBSD data

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