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Typically an EBSD system (Figure 1) consists of:

  • A crystalline sample tilted to 70º from horizontal, by use of the SEM stage or a pretilted holder.
  • A phosphor screen, which is fluoresced by the electrons scattered from the sample.
  • A sensitive camera together with optics for viewing the pattern formed on the phosphor screen.
  • An insertion mechanism, which accurately controls the position of the detector when it is in use, and retracts the detector to a safe position when it’s not in use to prevent interference with SEM operation.
  • Electronics to control the SEM, including the beam and stage movements.
  • A computer and software to control the EBSD experiments, collect and analyse the diffraction patterns, and display the results.
  • forescatter diodes (FSD) mounted around the phosphor screen, used to generate microstructure images of the sample before collecting EBSD data.
  • The EBSD system can optionally be integrated with an EDS system

Figure 1 An EBSD system.

figure 1a

(a) The principle components of an EBSD system.

figure 1b

(b) A photograph showing the EBSD system integrated with an EDS system.

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